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Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.

責任表示:
editors, Gerfield Zwicker ... [et al.]
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
991
出版情報:
Warrendale, Pa.: Materials Research Society, 2007
ISSN:
02729172
ISBN:
9781558999510 [1558999515]
請求記号:
M23500/991
資料種別:
国際会議録
巻号一覧
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