Instrumentation, metrology, and standards for nanomanufacturing : 29-30 August 2007, San Diego, California, USA
- 責任表示:
- Michael T. Postek, John A. Allgair, editors ; sponsored and published by SPIE
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6648
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering, 2007
- ISSN:
- 0277786X
- ISBN:
- 9780819467966 [0819467960]
- 請求記号:
- P63600/6648
- 資料種別:
- 国際会議録
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