Reliability, packaging, testing, and characterization of MEMS/MOEMS VI : 23-24 January, 2007, San Jose, California, USA
- 責任表示:
- MOEMS VI : 23-24 January, 2007, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6463
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering, 2007
- ISSN:
- 0277786X
- ISBN:
- 9780819465764 [0819465763]
- 請求記号:
- P63600/6463
- 資料種別:
- 国際会議録
類似資料:
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
2
国際会議録
MEMS/MOEMS components and their applications IV : 22-23 January 2007, San Jose, California, USA
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
6
国際会議録
Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |