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Micromachining technology for micro-optics and nano-optics V and microfabrication process technology XII : 22-24 January 2007, San Jose, California, USA

責任表示:
Mary-Ann Maher ... [et al.], chairs
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6462
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering, 2007
ISSN:
0277786X
ISBN:
9780819465757 [0819465755]
請求記号:
P63600/6462
資料種別:
国際会議録
巻号一覧
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