Materials, processes, integration and reliability in advanced interconnects for micro- and nanoelectronics : symposium held April 10-12, 2007, San Francisco, California, U.S.A.
- 責任表示:
- editors: Qinghuang Lin ... [et al.]
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 990
- 出版情報:
- Warrendale, Pa.: Materials Research Society, 2007
- ISSN:
- 02729172
- ISBN:
- 9781558999503 [1558999507]
- 請求記号:
- M23500/990
- 資料種別:
- 国際会議録
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