Materials for microlithography : radiation-sensitive polymers

責任表示:

L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984

シリーズ名:

ACS symposium series

シリーズ巻号:

266

出版情報:

Washington, D.C.: American Chemical Society, 1984

ISSN:

00976156

ISBN:

9780841208711 [0841208719]

請求記号:

A05800/266

資料種別:

国際会議録