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Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.

責任表示:
editors, Hans-Joachim L. Gossmann ... [et al.]
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
568
出版情報:
Warrendale, PA: MRS - Materials Research Society, 1999
ISSN:
02729172
ISBN:
9781558994751 [1558994750]
請求記号:
M23500/568
資料種別:
国際会議録
巻号一覧
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