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Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.

責任表示:
editors, Stuart Brown ... [et al.]
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
518
出版情報:
Warrendale, Pa.: MRS - Materials Research Society, 1998
ISSN:
02729172
ISBN:
9781558994249 [1558994246]
請求記号:
M23500/518
資料種別:
国際会議録
巻号一覧
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