Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas
- 責任表示:
- Stella W. Pang, Shih-Chia Chang, chairs
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2879
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering, 1996
- ISSN:
- 0277786X
- ISBN:
- 9780819422774 [0819422770]
- 請求記号:
- P63600/2879
- 資料種別:
- 国際会議録
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