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Plasma properties, deposition and etching

責任表示:
editors, J.J. Pouch and S.A. Alterovitz
シリーズ名:
Materials science forum
シリーズ巻号:
140-142
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications, 1993
ISSN:
02555476
ISBN:
9780878496709 [087849670X]
請求記号:
M23650
資料種別:
国際会議録
巻号一覧
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