Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France
- 責任表示:
- Bernard Courtois ... [et. al.], chairs
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3680
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering, 1999
- ISSN:
- 0277786X
- ISBN:
- 9780819431547 [0819431540]
- 請求記号:
- P63600/3680
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
2
国際会議録
Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
11
国際会議録
MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |