Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France
- 責任表示:
- MOEMS : 9-11 May 2000, Paris, France
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4019
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering, 2000
- ISSN:
- 0277786X
- ISBN:
- 9780819436450 [0819436453]
- 請求記号:
- P63600/4019
- 資料種別:
- 国際会議録
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