
Polymeric materials for microelectronic applications : science and technology
- 責任表示:
- Hiroshi Ito, editor, Seiichi Tagawa, editor, Kazuyuki Horie, editor
- シリーズ名:
- ACS symposium series
- シリーズ巻号:
- 579
- 出版情報:
- Washington, DC: American Chemical Society, 1994
- ISSN:
- 00976156
- ISBN:
- 9780841230552 [0841230552]
- 請求記号:
- A05800/579
- 資料種別:
- 国際会議録
類似資料:
American Chemical Society | |
American Society of Mechanical Engineers | |
American Chemical Society |
American Chemical Society |
Kluwer Academic Publishers | |
SPIE-The International Society for Optical Engineering |