Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
- 責任表示:
- editors, Bernd O. Kolbesen ... [et al.]. ; sponsored by the Electrochemical Society, Inc., Electronics Division
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3895
- 出版情報:
- Pennington, N.J.: SPIE - The International Society for Optical Engineering, 1999
- ISSN:
- 0277786X
- ISBN:
- 9780819434975 [0819434973]
- 請求記号:
- P63600/3895
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society | |
SPIE-The International Society for Optical Engineering |
8
国際会議録
Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Electrochemical Society |
Electrochemical Society |
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |