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Electron microscopy of semiconducting materials and ULSI devices : symposium held Aprl 15-16, 1998, San Francisco, California, U. S. A.

責任表示:
editors, Clive Hayzelden, Crispin Hetherington, Frances Ross
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
523
出版情報:
Warrendale, Pa.: MRS - Materials Research Society, 1998
ISSN:
02729172
ISBN:
9781558994294 [1558994297]
請求記号:
M23500/523
資料種別:
国際会議録
巻号一覧
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