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Modeling and simulation of thin-film processing : symposium held April 17-20, 1995, San Francisco, California, U.S.A.

責任表示:
editors, David J. Srolovitz ... [et al.]
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
389
出版情報:
Pittsburgh: MRS - Materials Research Society, 1995
ISSN:
02729172
ISBN:
9781558992924 [1558992928]
請求記号:
M23500/389
資料種別:
国際会議録
巻号一覧
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