Microelectronic Device Technology : 1-2 October 1997, Austin, Texas
- 責任表示:
- Mark Rodder, Toshiaki Tsuchiya, David Burnett, Dirk Wristers chairs
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3212
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering, 1997
- ISSN:
- 0277786X
- ISBN:
- 9780819426444 [081942644X]
- 請求記号:
- P63600/3212
- 資料種別:
- 国際会議録
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