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Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California

責任表示:
James H. Smith, Jean-Michel Karam, chairs
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3874
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering, 1999
ISSN:
0277786X
ISBN:
9780819434715 [081943471X]
請求記号:
P63600/3874
資料種別:
国際会議録
巻号一覧
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