Introduction to microlithography : theory, materials, and processing

責任表示:

L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983

シリーズ名:

ACS symposium series

シリーズ巻号:

219

出版情報:

Washington, D.C.: American Chemical Society, 1983

ISSN:

00976156

ISBN:

9780841207752 [0841207755]

請求記号:

A05800/219

資料種別:

国際会議録