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Introduction to microlithography : theory, materials, and processing

責任表示:
L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
シリーズ名:
ACS symposium series
シリーズ巻号:
219
出版情報:
Washington, D.C.: American Chemical Society, 1983
ISSN:
00976156
ISBN:
9780841207752 [0841207755]
請求記号:
A05800/219
資料種別:
国際会議録
巻号一覧
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