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Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.

責任表示:
editors, Nichoals E.B. Cowern ... [et al.]
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
532
出版情報:
Warrendale, Pa.: MRS - Materials Research Society, 1998
ISSN:
02729172
ISBN:
9781558994386 [1558994386]
請求記号:
M23500/532
資料種別:
国際会議録
巻号一覧
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