Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia | 東京工業大学附属図書館資料名データベース

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Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

責任表示:: Bernard Courtois, Serge Demidenko, chairs
シリーズ名:: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:: 3893
出版情報:: Bellingham, Wash.: SPIE - The International Society for Optical Engineering, 1999
ISSN:: 0277786X
ISBN:: 9780819434944 [0819434949]
請求記号:: P63600/3893
資料種別:: 国際会議録

巻号一覧

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詳細

TDL書誌ID:	ZA00017634
シリーズＩＤ:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Design, characterization, and packaging for MEMS and microelectronics
回次:	1999
会議開催地:	Royal Pines Resort, Queensland, Australia
会議開催年:	1999.10.27-1999.10.29

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