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16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany

責任表示:
Uwe F.W. Behringer, chair
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3996
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering, 2000
ISSN:
0277786X
ISBN:
9780819436146 [0819436143]
請求記号:
P63600/3996
資料種別:
国際会議録
巻号一覧
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