16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany
- 責任表示:
- Uwe F.W. Behringer, chair
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3996
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering, 2000
- ISSN:
- 0277786X
- ISBN:
- 9780819436146 [0819436143]
- 請求記号:
- P63600/3996
- 資料種別:
- 国際会議録
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