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Integrated circuits : chemical and physical processing : developed from the winter symposium

責任表示:
sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society, University of California--Davis, March 26-27, 1984 ; Pieter Stroeve, editor
シリーズ名:
ACS symposium series
シリーズ巻号:
290
出版情報:
Washington, D.C.: American Chemical Society, 1985
ISSN:
00976156
ISBN:
9780841209404 [0841209405]
請求記号:
A05800/290
資料種別:
国際会議録
巻号一覧
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