Micromachined devices and components II : 14-15 October 1996, Austin, Texas
- 責任表示:
- Kevin Chau, Ray M. Roop, chairs
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2882
- 出版情報:
- Bellingham, WA: SPIE-The International Society for Optical Engineering, 1996
- ISSN:
- 0277786X
- ISBN:
- 9780819422804 [0819422800]
- 請求記号:
- P63600/2882
- 資料種別:
- 国際会議録
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