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Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

責任表示:
Kevin Chau, Sima Dimitrijev, chairs
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3892
出版情報:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering, 1999
ISSN:
0277786X
ISBN:
9780819434937 [0819434930]
請求記号:
P63600/3892
資料種別:
国際会議録
巻号一覧
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