Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom
- 責任表示:
- Richard R.A. Syms, chair
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4075
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering, 2000
- ISSN:
- 0277786X
- ISBN:
- 9780819437129 [0819437123]
- 請求記号:
- P63600/4075
- 資料種別:
- 国際会議録
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