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Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices

責任表示:
edited by Orlando Auciello and Jürgen Engemann
シリーズ名:
NATO ASI series. Series E, Applied sciences
シリーズ巻号:
234
出版情報:
Dordrecht: Kluwer Academic Publishers, 1993
ISSN:
0168132X
ISBN:
9780792322658 [0792322657]
請求記号:
N11482/234
資料種別:
国際会議録
巻号一覧
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