Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices
- 責任表示:
- edited by Orlando Auciello and Jürgen Engemann
- シリーズ名:
- NATO ASI series. Series E, Applied sciences
- シリーズ巻号:
- 234
- 出版情報:
- Dordrecht: Kluwer Academic Publishers, 1993
- ISSN:
- 0168132X
- ISBN:
- 9780792322658 [0792322657]
- 請求記号:
- N11482/234
- 資料種別:
- 国際会議録
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