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Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia

責任表示:
Neil W. Bergmann, Olaf Reinhold, Norman C. Tien, chairs
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3891
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering, 1999
ISSN:
0277786X
ISBN:
9780819434920 [0819434922]
請求記号:
P63600/3891
資料種別:
国際会議録
巻号一覧
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