Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
- 責任表示:
- editors, Tomas Diaz de la Rubia ... [et al.]
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 469
- 出版情報:
- Pittsburg, Pa.: MRS - Materials Research Society, 1997
- ISSN:
- 02729172
- ISBN:
- 9781558993730 [1558993738]
- 請求記号:
- M23500/469
- 資料種別:
- 国際会議録
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