Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA
- 責任表示:
- Iraj Emami, Kenneth W. Tobin, Jr. ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH, Inc
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6155
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering, 2006
- ISSN:
- 0277786X
- ISBN:
- 9780819461988 [0819461989]
- 請求記号:
- P63600/6155
- 資料種別:
- 国際会議録
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