Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
- 責任表示:
- MOEMS V
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6111
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering, 2006
- ISSN:
- 0277786X
- ISBN:
- 9780819461537 [0819461539]
- 請求記号:
- P63600/6111
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
7
国際会議録
Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
10
国際会議録
MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
11
国際会議録
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France
SPIE - The International Society for Optical Engineering |
6
国際会議録
Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |