Micromachining and Microfabrication Process Technology XI
- 責任表示:
- Ann Maher
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6109
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering, 2006
- ISSN:
- 0277786X
- ISBN:
- 9780819461513 [0819461512]
- 請求記号:
- P63600/6109
- 資料種別:
- 国際会議録
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