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Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA

責任表示:
Lahsen Assoufid, Peter Z. Takacs, John S. Taylor, chairs
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5921
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering, 2005
ISSN:
0277786X
ISBN:
9780819459268 [0819459267]
請求記号:
P63600/5921
資料種別:
国際会議録
巻号一覧
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