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Two- and three-dimensional methods for inspection and metrology III : 24-26 October, 2005, Boston, Massachusetts, USA

責任表示:
Kevin G. Harding, chair
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6000
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering, 2005
ISSN:
0277786X
ISBN:
9780819460240 [0819460249]
請求記号:
P63600/6000
資料種別:
国際会議録
巻号一覧
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