Defects in high-κ gate dielectric stacks : nano-electronic semiconductor devices | 東京工業大学附属図書館資料名データベース

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Defects in high-κ gate dielectric stacks : nano-electronic semiconductor devices

責任表示:: edited by Evgeni Gusev
シリーズ名:: NATO science series. Series 2, Mathematics, physics and chemistry
シリーズ巻号:: 220
出版情報:: Dordrecht: Springer, 2006
ISBN:: 9781402043659 [1402043651]
請求記号:: N17050/220
資料種別:: 国際会議録

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詳細

TDL書誌ID:	ZA00015853
シリーズＩＤ:	PA00000025
会議名:	NATO Advanced Research Workshop on Defects in Advanced High-k Dielectric Nano-electronic Semiconductor Devices
回次:	2005
会議開催地:	St. Petersburg, Russia
会議開催年:	2005.07.11-2005.07.14

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