
Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.
- 責任表示:
- editors, C.Y. Wong, C.V. Thompson, K.N. Tu
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 106
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society, 1988
- ISSN:
- 02729172
- ISBN:
- 9780931837746 [093183774X]
- 請求記号:
- M23500/106
- 資料種別:
- 国際会議録
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