
Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA
- 責任表示:
- editors, Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 101
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society, 1988
- ISSN:
- 02729172
- ISBN:
- 9780931837692 [0931837693]
- 請求記号:
- M23500/101
- 資料種別:
- 国際会議録
類似資料:
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