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Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.

責任表示:
editors, J.W. Coburn, R.A. Gottscho, D.W. Hess
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
68
出版情報:
Pittsburgh, Pa.: Materials Research Society, 1986
ISSN:
02729172
ISBN:
9780931837340 [0931837340]
請求記号:
M23500/68
資料種別:
国際会議録
巻号一覧
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MRS - Materials Research Society
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