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Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

責任表示:
editors, R.P.H. Chang, B. Abeles
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
38
出版情報:
Pittsburgh, Pa.: Materials Research Society, 1985
ISSN:
02729172
ISBN:
9780931837036 [0931837030]
請求記号:
M23500/38
資料種別:
国際会議録
巻号一覧
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