Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France | 東京工業大学附属図書館資料名データベース

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Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France

責任表示:: editors, Bernd O. Kolbesen ... [et al.] ; sponsoring division, Electronics and Photonics
シリーズ名:: Electrochemical Society Proceedings Series
シリーズ巻号:: 2005-10
出版情報:: Pennington, N.J.: Electrochemical Society, 2005
ISSN:: 01616374
ISBN:: 9781566774284 [1566774284]
請求記号:: E23400/200510
資料種別:: 国際会議録

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詳細

TDL書誌ID:	ZA00015393
シリーズＩＤ:	PA00000028
会議名:	DECON ; Satellite Symposium to ESSDERC
回次:	2005 ; 35th
会議開催地:	Grenoble, France
会議開催年:	2005.09.12-2005.09.16

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