Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium
- 責任表示:
- editors, R.E. Sah ... [et al.] ; sponsoring divisions, Dielecric Scoeice and Technology, Electronics
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2005-01
- 出版情報:
- Pennington, N.J.: Electrochemical Society, 2005
- ISSN:
- 01616374
- ISBN:
- 9781566774598 [1566774594]
- 請求記号:
- E23400/200501
- 資料種別:
- 国際会議録
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