Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium | 東京工業大学附属図書館資料名データベース

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Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium

責任表示:: editors, R.E. Sah ... [et al.] ; sponsoring divisions, Dielecric Scoeice and Technology, Electronics
シリーズ名:: Electrochemical Society Proceedings Series
シリーズ巻号:: 2005-01
出版情報:: Pennington, N.J.: Electrochemical Society, 2005
ISSN:: 01616374
ISBN:: 9781566774598 [1566774594]
請求記号:: E23400/200501
資料種別:: 国際会議録

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詳細

TDL書誌ID:	ZA00015386
シリーズＩＤ:	PA00000028
会議名:	Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films ; Meeting of the Electrochemical Society
回次:	8th ; 207th
会議開催地:	Quebec City, Quebec, Canada
会議開催年:	2005.05.16-2005.05.20

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