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Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.

責任表示:
editors, Harold Kahn ... [et al.]
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
657
出版情報:
Warrendale, Pa.: Materials Research Society, 2000
ISSN:
02729172
ISBN:
9781558995673 [1558995676]
請求記号:
M23500/657
資料種別:
国際会議録
巻号一覧
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