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Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.

責任表示:
editors, Duane S. Boning ... [et al.]
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
767
出版情報:
Warrendale, Pa.: Materials Research Society, 2003
ISSN:
02729172
ISBN:
9781558997042 [1558997040]
請求記号:
M23500/767
資料種別:
国際会議録
巻号一覧
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