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Chemical mechanical polishing 2000 -- fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A.

責任表示:
editors, Rajiv K. Singh ... [et al.]
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
613
出版情報:
Warrendale, PA: Materials Research Society, 2001
ISSN:
02729172
ISBN:
9781558995215 [1558995218]
請求記号:
M23500/613
資料種別:
国際会議録
巻号一覧
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