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Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.

責任表示:
editors, G.S Oehrlein ... [et al.]
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
612
出版情報:
Warrendale, PA: Materials Research Society, 2001
ISSN:
02729172
ISBN:
9781558995208 [155899520X]
請求記号:
M23500/612
資料種別:
国際会議録
巻号一覧
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