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Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.

責任表示:
editors: S.V. Babu ... [et al.]
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
566
出版情報:
Warrendale, PA: Materials Research Society, 2000
ISSN:
02729172
ISBN:
9781558994737 [1558994734]
請求記号:
M23500/566
資料種別:
国際会議録
巻号一覧
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