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Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.

責任表示:
editors, Arthur H. Heuer, S. Jushua Jacobs
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
546
出版情報:
Warrendale, Pa.: Materials Research Society, 1999
ISSN:
02729172
ISBN:
9781558994522 [1558994521]
請求記号:
M23500/546
資料種別:
国際会議録
巻号一覧
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