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Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

責任表示:
editors, V.J. Kapoor, W.D. Brown ; Dielectric Science and Technology and Electronics Divisions
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1994-16
出版情報:
Pennington, NJ: Electrochemical Society, 1994
ISSN:
01616374
ISBN:
9781566770484 [1566770483]
請求記号:
E23400/942240
資料種別:
国際会議録
巻号一覧
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