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Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium

責任表示:
editors, R.E. Sah ... [et al.] ; sponsoring divisions, Dielecric Scoeice and Technology, Electronics
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-2
出版情報:
Pennington, N.J.: Electrochemical Society, 2003
ISSN:
01616374
ISBN:
9781566773478 [1566773474]
請求記号:
E23400/200302
資料種別:
国際会議録
巻号一覧
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